followed by the deployment of perfluorocarbon reduction technologies to help reduce Scope 1 fugitive emissions. Technology-specific marginal abatement costs of CO 2 were also estimated and varied ...

The booth will present vacuum pumps, contamination management systems, leak detectors, valves, gas abatement solutions and comprehensive sub-fab mana ...

gas abatement systems, dry screw vacuum pumps, and further leak detectors as well as multi-stage rotary lobe vacuum pumps are displayed in this model. Vacuum pumps for the semiconductor industry ...