FREMONT, Calif. – Asyst Technologies, Inc., has announced the Axys FastSwap atmospheric wafer transfer robot, which it claims is capable of replacing a processed wafer with a fresh one in less than ...

Proprietary systems have traditionally dominated the control of three and four-axis wafer handling robots for in-vacuum and in-air wafer applications. As a result, these systems can be limited in ...

Genmark Automation said it has added a built-in wafer-mapping sensor to its wafer handlers to increase system throughput and provide flawless wafer transfer. The Global Positioning Robot Swap-Master ...

At the beginning of my career in semiconductor equipment, the backside of the wafer was a source of anxiety. In one memorable instance in my early career, several wafers flew off a robot blade during ...